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Wafer Expander System

NEX-8
  • Wafer expanding system to get more space between each chips.
Work Flow
  • Inner Hoop ring loading (Plate) → Loading (Ring Frame & material) → Outer Hoop ring loading (Upper cover) → Locking → Z-axis up → Expanding → Unloading
System Main Features
  • 8”Ring Frame /GRP-8 Hoop Ring.
  • No need air and vacuum.
  • Up/down height control using stepping motor.
  • Touch screen user interface
  • Multi-language user interface (Korean/English/ Chinese/Japanese)

SPECIFICATIONS

6P/N P/N IDØA ODØB T
GRP-4 Ø140/Ø146 Ø146/Ø152 6
GRP-5 Ø170/Ø178 Ø178/Ø186 6
GRP-6 Ø195/Ø203 Ø203/Ø210 6
GRP-8 Ø225/Ø233 Ø233/Ø241  
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소모품 관련 반도체 장비 사업부 기술영업팀

장비기술영업팀
sales@neontech.co.kr
Tel : 070-5090-2081~2085