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Manual UV Curing System

NUV-68
  • Ultra violet curing system for easy chip separation of mechanical dicing application
Work Flow
  • Mechanical dicing(NEON NDS series) → UV → Light radiation → UV curing(hardening) → Chip separation
Main Features
  • 6”, 8” compatible
  • 352nm wavelength light
  • Lamp life : 3,000H
  • Touch screen user interface
  • Easy UV LAMP change
  • UV lamp intensity control function
  • Auto sliding tray

SPECIFICATIONS

  Items NUV-68
1 Work size 6”~ 8” wafer ring frame
2 N2 Gas Pressure 3kg/cm2
3 N2 Gas flow 1 l/m (adjustable)
4 UV lamp UV-A
5 Wavelength 352 nm
6 Size (W x D x H) 440 x 560 x 240mm
7 Weight 25 Kg
8 Lamp power 8W X 11 Line
9 Lamp life time 3000 Hr
10 Power supply 220V 60Hz 15A
自动化设备及消耗品相关半导体设备事业部技术营业组

设备技术营业组
sales@neontech.co.kr
Tel : 070-5090-2081~2085