• ETC

    고객만족을 넘어 세계로 도약하는 NEONTECH

Semi Automatic Spin Cleaning System

NSD-68
  • Particle / contamination cleaning system using high speed spinning & DI water
  • Built-in high pressure atomizer, sponge & Nylon brush.
Work Flow
  • Material loading → Spin & atomizer cleaning → Brush cleaning(if need) → DI water washing → Air dry → Spin dry → Unloading
Main Features
  • Support various chuck design & size (Up to 12”)
  • Programmable cleaning recipe (Max 7-step cleaning mode)
  • Maximum RPM : 2,000rpm
  • Manual material loading & unloading
  • Material holding : vacuum & clamp

Substrate & Dual Nozzle

Square Type with Brush

Circle Type with Brush

SPECIFICATIONS

Items Specifications
1 Material Size Up to 12”
2 Controller PLC with touch UI
3 Spinning Motor AC servo 400W
4 Typical RPM 500 ~ 2000 rpm
5 Nozzle #1 High pressure atomizer
6 Nozzle #2 Atomizer or brush
7 Nozzle Moving Motor Stepping motor
8 Nozzle Moving Parameter Speed & angle
9 Dimension(W x D x H) 650 x 1,100 x 1,250mm
10 Water Consumption 1~2 liter/min
11 Air Consumption 200 liter/min
12 Air Pressure 0.4 ~ 0.6 MPa
13 Electricity 220V Single Phase 50/60Hz 15A
자동화설비 및
소모품 관련 반도체 장비 사업부 기술영업팀

장비기술영업팀
sales@neontech.co.kr
Tel : 070-5090-2081~2085